dI(y)(dng)B(ti)
mco늳mc(din)^
mco늳mc(din)^
1. o늳m
a. (yu)c(din)
mЧʸߣ_(d)99%pʧСw100-200Pa,g(sh)(yng)ÏV
b. ȱc(din)
O(sh)ռeҪ߉ֱԴϵy(tng)һͶYM(fi)øߣ(du)úN׃^mЧwӰ푴졢b\(yn)йˮƽҪ
2. ܇m
a. (yu)c(din)
mЧʺܸ_(d)99.98%m(yng)(qing)̎ͬ͵we(du)o늳mײĸ߱mЧm(yng)|(zh)ȷ(du)ٵ׃Ҳһķ(wn)Y(ji)(gu)(jin)(ni)o(w)(f)sY(ji)(gu)
b. ȱc(din)
pʧw800-1500Pa
xm
1. ʹÜض
(du)ڴʽm(li)f(shu)ʹÜضȡQڃɂ(g)أһǞVϵ߳ܜضڶǚwضȱ¶c(din)ضĿǰڲwVϵĴãʹÜضȿ_(d)280(du)@һضȵĚw횲ȡشʩ(du)¶c(din)Ĝض횲ȡشʩ
(du)ʽm(li)f(shu)ʹÜضcmЧP(gun)ϵ@@һc(din)ͬ늳m(du)늳m(li)f(shu)ضȵ׃(hu)Ӱ푵ۉmıȣӰ푳mЧ
2.m̎L(fng)Q
̎L(fng)ָmچλr(sh)g(ni)܃wweλÿСr(sh)ÿСr(sh)(bio)ǴʽmO(sh)Ӌ(j)Ҫ֮һ